VECO · Annual Report (Form 10-K) · Filed February 25, 2026

Veeco Instruments Inc — 10-K exhibit

veco-20251231xex23d1.htm

Veeco Instruments Inc on Boardroom Alpha

Exhibit 23.1

Consent of Independent Registered Public Accounting Firm

We consent to the incorporation by reference in the registration statements listed below of our reports dated February 25, 2026, with respect to the consolidated financial statements of Veeco Instruments Inc. and subsidiaries and the effectiveness of internal control over financial reporting.


Registration No.		Form		Plan
333-166852		S-8		Veeco Instruments Inc. 2010 Stock Incentive Plan
333-194737		S-8		Veeco Instruments Inc. 2010 Stock Incentive Plan, Veeco Instruments Inc. 2013 Inducement Stock Incentive Plan
333-211781		S-8		Veeco Instruments Inc. Amended and Restated 2010 Stock Incentive Plan, Veeco Instruments Inc. 2016 Employee Stock Purchase Plan
333-218256		S-8		Ultratech, Inc. 1993 Stock Option/Stock Issuance Plan as amended and restated May 31, 2017
333-231266		S-8		Veeco Instruments Inc. 2019 Stock Incentive Plan; First Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan
333-242450		S-3		Veeco Instruments Inc. Shelf Registration Statement
333-256004		S-8		Second Amendment to Veeco Instruments Inc. 2016 Employee Stock Purchase Plan
333-265117		S-8		Amendment No. 1 to the Veeco Instruments Inc. 2019 Stock Incentive Plan
333-281439		S-8		Amendment No. 2 to the Veeco Instruments Inc. 2019 Stock Incentive Plan
333-287518		S-8		Third Amendment to the Veeco Instruments Inc. 2016 Employee Stock Purchase Plan
333-287523		S-3		Veeco Instruments Inc. Shelf Registration Statement

/s/ KPMG LLP

Santa Clara, California
February 25, 2026

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