Exhibit 21.1
SUBSIDIARIES
Name |
| Jurisdiction |
Rudolph Technologies, Inc. |
| U.S.A. |
4D Technology Corporation |
| U.S.A. |
Inspectrology LLC |
| U.S.A. |
Lumina Instruments Inc. |
| U.S.A |
Semilab USA LLC |
| U.S.A |
Onto Innovation Japan Co. Ltd. |
| Japan |
Onto Innovation (Shanghai) Trading Co., Ltd. |
| China |
Onto Innovation Germany GmbH |
| Germany |
Onto Innovation Hong Kong Limited |
| Hong Kong |
Onto Innovation Europe, B.V. |
| Netherlands |
Onto Innovation Switzerland GmBH |
| Switzerland |
Onto Innovation Korea Ltd. |
| Korea |
Onto Innovation Southeast Asia Pte. Limited |
| Singapore |
Onto Innovation Ireland Limited |
| Ireland |
Onto Innovation Malaysia Sdn. Bhd. |
| Malaysia |
Onto Innovation Vietnam PTE Company Limited |
| Vietnam |
Neta SAS |
| France |
Liteq B.V. |
| Netherlands |