ACLS · Annual Report (Form 10-K) · Filed February 26, 2026

Axcelis Technologies Inc — 10-K exhibit

acls-20251231xex23d1.htm

Axcelis Technologies Inc on Boardroom Alpha

Exhibit 23.1

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We consent to the incorporation by reference in the following Registration Statements:

(1)

Registration Statements (Form S-8 Nos. 333-181750, 333-188967, 333-196157, 333-204544, 333-211673, 333-218225, 333-231634 and 333-287655) pertaining to the 2012 Equity Incentive Plan of Axcelis Technologies, Inc.,

(2)

Registration Statement (Form S-8 No. 333-238770) pertaining to the 2020 Employee Stock Purchase Plan of Axcelis Technologies, Inc.,

(3)

Registration Statement (Form S-8 No. 333-120356) pertaining to the 2000 Stock Plan and 2012 Equity Incentive Plan,

(4)

Registration Statement (Form S-3 No. 333-273639) and related Prospectus of Axcelis Technologies, Inc., and

(5)

Registration Statement (Form S-4 No. 333-292008) of Axcelis Technologies, Inc.;

of our reports dated February 26, 2026, with respect to the consolidated financial statements and schedule of Axcelis Technologies, Inc. and the effectiveness of internal control over financial reporting of Axcelis Technologies, Inc. included in this Annual Report (Form 10-K) of Axcelis Technologies, Inc. for the year ended December 31, 2025.

/s/ Ernst & Young LLP

Boston, Massachusetts
February 26, 2026

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