Exhibit 10.8
Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at February 14, 2026
This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows:
Role | Annual Retainers in Effect as of July 1, 2025 to date, paid quarterly in advance |
Board Member | $65,000 |
Audit Committee Chair | $25,000 |
Compensation Committee Chair | $20,000 |
Nominating and Governance Committee Chair | $10,000 |
Technology and New Product Development Committee Chair | $10,000 |
Audit Committee Member | $12,500 |
Compensation Committee Member | $10,000 |
Nominating and Governance Committee Member | $5,000 |
Technology and New Product Development Committee Member | $5,000 |
Chairperson/Lead Director of the Board Premium | $60,000 |
Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.
The Board of Directors may, from time to time, form committees in addition to the Audit, Compensation, Nominating and Governance and Technology and Product Development Committees and set compensation for service on such additional committees.